论文信息 - Electrical Characteristics of n, p-In0.53Ga0.47As MOSCAPs With In Situ PEALD-AlN Interfacial Passivation Layer - 字舞流文

Electrical Characteristics of n, p-In0.53Ga0.47As MOSCAPs With In Situ PEALD-AlN Interfacial Passivation Layer

C. Hu | S. Salahuddin | Yueh-Chin Lin | E. Chang | Y. Wong | Hong-Quan Nguyen | H. Trinh | Q. Luc | H. Do