Double positive beveling: A better edge contour for high-voltage devices

A theoretical analysis is made of the field distribution near the surface of p-n-p structures with double positive edge geometry. This geometry offers in principle the possibility of avoiding the limitations and disadvantages inherent in the use of negative bevel angles. The results show that the reduction of the maximum field at the surface is not as easy as for the case of a simple positive bevel angle and that consequently the passivation of the surface may present more problems. Nevertheless, it is demonstrated that this geometry offers a number of great advantages and presents a real alternative for use in future high-voltage devices. A number of devices, dimensioned for a breakdown voltage of 6 kV, were made with this edge geometry. The measurements show that the reverse current corresponds to the thermally generated current in the space-charge layer and that no significant current flows at the surface. The breakdown voltage corresponds to the theoretical breakdown voltage in the bulk, unlike in the case of double negative beveling. The advantages of this geometry with respect to the conventional negative bevel angle are no significant reduction of active area, no dependence on the doping profile, and no limitation in voltage. A disadvantage, however, is the presence of higher fields at the surface.