Near common-path optical fiber interferometer for potentially fast on-line microscale-nanoscale surface measurement.

We introduce a new surface measurement method for potential online application. Compared with our previous research, the new design is a significant improvement. It also features high stability because it uses a near common-path configuration. The method should be of great benefit to advanced manufacturing, especially for quality and process control in ultraprecision manufacturing and on the production line. Proof-of-concept experiments have been successfully conducted by measuring the system repeatability and the displacements of a mirror surface.

[1]  T. Vorburger,et al.  Optical techniques for on-line measurement of surface topography , 1981 .

[2]  S. Wada,et al.  Surface Shape Measurement by Wavelength Scanning Interferometry Using an Electronically Tuned Ti:sapphire Laser , 2001 .

[3]  Atsushi Taguchi,et al.  Optical 3D profilometer for in-process measurement of microsurface based on phase retrieval technique , 2004 .

[4]  Cho Jui Tay,et al.  In situ surface roughness measurement using a laser scattering method , 2003 .

[5]  O. Ryabov,et al.  Laser displacement meter application for milling diagnostics , 1998 .

[6]  Ichirou Yamaguchi,et al.  Surface profilometry by wavelength scanning Fizeau interferometer , 2000 .

[7]  I. Yamaguchi,et al.  Profilometry of Sloped Plane Surfaces by Wavelength Scanning Interferometry , 2002 .

[8]  I. Yamaguchi,et al.  Wavelength scanning profilometry for real-time surface shape measurement. , 1997, Applied optics.

[9]  Wei Zhang,et al.  Investigation of some critical aspects of on-line surface measurement by a wavelength-division-multiplexing technique , 2006 .

[10]  C. Quan,et al.  Development of a laser-scattering-based probe for on-line measurement of surface roughness. , 2003, Applied optics.

[11]  Ichirou Yamaguchi,et al.  Surface topography by wavelength scanning interferometry , 2000 .

[12]  Ian Bennion,et al.  High stability multiplexed fiber interferometer and its application on absolute displacement measurement and on-line surface metrology. , 2004, Optics express.