论文信息 - Effect of the cathodes on the characteristics of the MEMS based electrochemical seismometer

Effect of the cathodes on the characteristics of the MEMS based electrochemical seismometer

The effects of the cathodes on the characteristics of the electrochemical seismometer were first studied in this paper. By utilizing the proposed MEMS fabrication process, four types of devices with cathodes of different structures were carefully designed and fabricated for comparison. The experimental results indicated that the sidewall cathodes mainly affected the attenuation rate in the high frequency domain and the surface cathodes per unit area had more effects on the device sensitivity than the sidewall cathodes per unit area. Moreover, the proposed electrochemical seismometers only with surface cathodes were featured with central working frequency less than 1 Hz.

[1] A. C. Riddiford,et al. The Kinetics of the Iodine Redox Process at Platinum Electrodes , 1961 .

[2] V. A. Kozlov,et al. Frequency Characteristics of a Spatially-Confined Electrochemical Cell under Conditions of Convective Diffusion , 2002 .

[3] V. M. Agafonov,et al. Diffusion Sensor of Mechanical Signals: Frequency Response at High Frequencies , 2004 .

[4] F. Smit. Experiences With OBS Node Technology In the Greater Mars Basin , 2010 .

[5] V. M. Agafonov,et al. 3D numerical simulation of the pressure-driven flow in a four-electrode rectangular micro-electrochemical accelerometer , 2010 .

[6] Junbo Wang,et al. A MEMS Based Electrochemical Vibration Sensor for Seismic Motion Monitoring , 2014, Journal of Microelectromechanical Systems.

[7] Vadim M. Agafonov,et al. Electrochemical Seismometers of Linear and Angular Motion , 2015 .

[8] Junbo Wang,et al. An electrochemical seismometer with frequency features under regulation , 2015, 2015 IEEE SENSORS.