Automatically reigniting dc vacuum arc plasma source
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A spark reignition system designed and produced to enhance vacuum arc deposition is presented. The system, in which the metal arc can be automatically reignited so as to minimize film contamination, not only initially ignites the arc by means of a spark component, but also reignites the spark automatically when the arc is near extinguishing. This automatic reignition system can effectively curb the pressure fluctuations induced by arc extinction and thus enhance the deposition procedure.
[1] S. Goldsmith,et al. Ion current distribution in a filtered vacuum arc deposition system , 1995 .
[2] H. Mecke,et al. Possibilities of influencing vacuum arc evaporation by time-dependent arc current , 1995 .
[3] S. Goldsmith,et al. Influence of an external magnetic field on cathode spot motion and coating deposition using filtered vacuum arc evaporation , 1994 .
[4] A. Perry,et al. A study of the macroparticle distribution in cathodic-arc-evaporated TiN films , 1991 .