On the use of the matrix pencil method for deep level transient spectroscopy: MP-DLTS

A new approach to capacitance transient analysis, based on the matrix pencil (MP) method, is proposed for deep level transient spectroscopy (DLTS) (MP-DLTS). The MP method offers the least statistical variance of the estimates in the presence of noise. Simulation tests have shown this method to lead to a significant improvement in DLTS resolution even for low trap concentrations. Its noise sensitivity and resolution are quantified and compared with five different DLTS analysis techniques. The MP-DLTS method is found to outperform both DLTS spectrum and direct transient analysis techniques. An experimental investigation of the electrically active defects induced by a germanium preamorphization step prior to dopant implantation was undertaken using the MP-DLTS method. Two electron traps were detected in all samples and characterized.

[1]  A. Rohatgi,et al.  Comparison of covariance linear predictive modeling to the modulation function method for use in deep level transient spectroscopy , 1994 .

[2]  N. H. March.  Techniques of Physics , 1993 .

[3]  G. L. Miller,et al.  A correlation method for semiconductor transient signal measurements , 1975 .

[4]  Electrically active defects in BF2+ implanted and germanium preamorphized silicon , 1998 .

[5]  Lester F. Eastman,et al.  The analysis of exponential and nonexponential transients in deep‐level transient spectroscopy , 1981 .

[6]  Konstantinos Konstantinides,et al.  Statistical analysis of effective singular values in matrix rank determination , 1988, IEEE Trans. Acoust. Speech Signal Process..

[7]  Tapan K. Sarkar,et al.  Matrix pencil method for estimating parameters of exponentially damped/undamped sinusoids in noise , 1990, IEEE Trans. Acoust. Speech Signal Process..

[8]  R. Kassing,et al.  Deep Level Transient Fourier Spectroscopy (DLTFS)—A technique for the analysis of deep level properties , 1988 .

[9]  Y. Hua,et al.  Generalized pencil-of-function method for extracting poles of an EM system from its transient response , 1989 .

[10]  Gene H. Golub,et al.  Matrix computations , 1983 .

[11]  D. Lang.  Deep‐level transient spectroscopy: A new method to characterize traps in semiconductors , 1974 .

[12]  K. Roenker,et al.  Refinements in the method of moments for analysis of multiexponential capacitance transients in deep‐level transient spectroscopy , 1987 .

[13]  T. Chappell,et al.  Modulating Functions Waveform Analysis of Multi-Exponential Transients for Deep-Level Transient Spectroscopy , 1986 .

[14]  A. Rohatgi,et al.  A new figure of merit and methodology for quantitatively determining defect resolution capabilities in deep level transient spectroscopy analysis , 1994 .

[15]  David Adler,et al.  The use of linear predictive modeling for the analysis of transients from experiments on semiconductor defects , 1984 .

[16]  E. Losson,et al.  Practical methods to improve DLTS data smoothing , 1996 .