论文信息 - Metrology Development for the Nanoelectronics Industry at the National Institute of Standards and Technology

Metrology Development for the Nanoelectronics Industry at the National Institute of Standards and Technology

The National Institute of Standards and Technology has provided and continues to provide critical metrology development for the semiconductor manufacturing industry as it moves from the microelectronics era into the nanoelectronics era. This presentation will describe the National Semiconductor Metrology Program, including a detailed discussion of several projects: Nanolithography Using Scanning Probe Oxidation; Atomic-Level Film Characterization; and Nanoelectronic Device Characterization.

Richard M. Silver | Curt A. Richter | J A Dagata | J. V. Martinez De Pinillos | E Vogel

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