Improved surface properties of InP through chemical treatments

Chemical treatment is a very effective method for passivation of semiconductor surfaces. HF and sulfide (Na2S⋅9H2O) pretreatments of InP have been shown to improve the properties of BaF2/InP interface significantly. The interface state density as obtained from C–V (1 MHz) measurements of metal‐insulator–semiconductor structures was found to be reduced from 5.8×1010 cm−2 eV−1 to 2.1×1010 cm−2 eV−1 after HF treatment. The reduced interface state density resulted in increased photoluminescence intensity. X‐ray photoelectron spectroscopy studies revealed that the formation of InF3 and P2S3 after HF and sulfide treatments, respectively, are responsible for better interfacial behavior.

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