Pressure sensor design and simulation using the CAEMENS-D

A workstation-based simulation module for micromachined silicon diaphragm structures and its application to capacitive pressure transducers are reported. The module offers a menu-driven user interface, access to a growing database of material parameters and performance data, and an interface to commercial finite-element software. It provides the user with three-dimensional stress, deflection, resistance, and capacitance information and allows three-dimensional visualization of complex diaphragm structures. Finite-element simulations of boron-diffused, thin-diaphragm capacitive pressure transducers, produced using the dissolved-wafer process, allow effects such as diaphragm stress, dielectric-based stress compensation, corrugations and bosses to be explored. Detailed comparisons between the simulations and experimental data generally agree to within a few percent.<<ETX>>

[1]  Khalil Najafi,et al.  An ultrasensitive silicon pressure-based flowmeter , 1989, International Technical Digest on Electron Devices Meeting.

[2]  Khalil Najafi,et al.  Scaling and dielectric stress compensation of ultrasensitive boron-doped silicon microstructure , 1990, IEEE Proceedings on Micro Electro Mechanical Systems, An Investigation of Micro Structures, Sensors, Actuators, Machines and Robots..

[3]  K.D. Wise,et al.  Scaling limits in batch-fabricated silicon pressure sensors , 1987, IEEE Transactions on Electron Devices.

[4]  K. Wise,et al.  SENSIM: A simulation program for solid-state pressure sensors , 1982, IEEE Transactions on Electron Devices.

[5]  S. Crary,et al.  CAEMEMS: an integrated computer-aided engineering workbench for micro-electro-mechanical systems , 1990, IEEE Proceedings on Micro Electro Mechanical Systems, An Investigation of Micro Structures, Sensors, Actuators, Machines and Robots..

[6]  Mario Di Giovanni,et al.  Flat and Corrugated Diaphragm Design Handbook , 1982 .

[7]  K. Wise,et al.  An ultraminiature solid-state pressure sensor for a cardiovascular catheter , 1988 .