The ARS-scatterometer at the IOF Jena which has been designed and built in cooperation with the Carl Zeiss JENA GmbH is capable of performing accurate measurements of the BRDF over a range of approximately eleven orders of magnitude (from 105 to 10-6 sr-1) in BRDF. These measurements can be carried out for surfaces made of any dielectric, metallic or semiconductor material. A He-Ne-laser is used in conjunction with a mirror beam focusing optics. The eight motorized degrees of freedom of the instruments are computer controlled and interfaced to the user by a sophisticated software running under MicroSoft Windows. It is shown, that the scatterometer is sensitive to a rms-roughness better than 1 nm.
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