论文信息 - Evolution of the interface structure of bonded Si wafers after high temperature annealing - 字舞流文

Evolution of the interface structure of bonded Si wafers after high temperature annealing

U. Gösele | P. Werner | E. Pippel | R. Falster | M. Seacrist | V. Vdovin | N. Zakharov | M. Ries | M. G. Mil’vidskiĭ