공기스프링과 압전작동기를 결합한 복합형 미진동 방진마운트 시스템 개발

A new hybrid mount system is proposed for microvibration control in a high-tech factory. The mount consists of an airspring as a passive device and a piezostack actuator as an active device. The two devices are connected in series. Some numerical simulations and experimental tests are carried out to evaluate isolation performance of the mount system comprising of four proposed hybrid mounts. As a control logic, the specific algorithm is adopted for considering multiple target frequencies of excitation based on a Filtered-X LMS algorithm. The results are compared with isolation performance of the passive airspring mount system. It is confirmed that the proposed hybrid mount system has great performance on microvibration.