Monolithic integration of quantum cascade laser, quantum cascade detector, and subwavelength waveguides for mid-infrared integrated gas sensing

Mid-infrared trace gas sensing is a rapidly developing field with wide range of applications. Although CRDS, TDLAS, FTIR and others, can provide parts per billion and in some cases, parts per trillion sensitivities, these systems require bulky and expensive optical elements and, furthermore, are very sensitive to beam alignment and have significant size and weight that place constrains on their applications in the field, particularly for airborne or handheld platforms. Monolithic integration of light sources and detectors with an optically transparent passive photonics platform is required to enable a compact trace gas sensing system that is robust to vibrations and physical stress. Since the most efficient quantum cascade lasers (QCLs) demonstrated are in the InP platform, the choice of InGaAs-InP for passive photonics eliminates the need for costly wafer bonding versus silicon, germanium of GaAs, that would require optically absorbing bonding interfaces. The InGaAs-InP material platform can potentially cover the entire λ=3-15μm molecular fingerprint region. In this paper, we experimentally demonstrate monolithic integration of QCL, quantum cascade detector (QCD) and suspended membrane sub-wavelength waveguides in a fully monolithic InGaAs/InP material system. The transverse magnetic polarized QCL emission is efficiently coupled into an underlying InGaAs suspended membrane subwavelength waveguide. In addition to low-loss compact waveguide bends, the suspended membrane architecture offers a high analyte overlap integral with the analyte. The propagating light is absorbed at the peak absorbance wavelength of the selected analyte gas and the transduced signal is detected by the integrated QCD. Gas sensing will be demonstrated.