A highly sensitive silicon chip microtransducer for air flow and differential pressure sensing applications

Abstract A miniature flow sensor, consisting of a thin film thermally-isolated microstructure integrated onto a silicon chip, has a large temperature response over a broad range of air flow velocities. When packaged in a suitable channel to provide a controlled laminar flow, the sensor response can be calibrated for velocity, mass flow or differential pressure. The sensor combines advantages of sensitivity, small size, low power and low cost and can be used in a broad range of flow and differential pressure applications.

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