论文信息 - Ultra low loss transmission lines on low resistivity silicon substrate

Ultra low loss transmission lines on low resistivity silicon substrate

The properties of transmission lines on low-resistivity silicon substrate (/spl rho/=10 /spl Omega/.cm) are investigated. Coplanar lines on silicon substrate with a 10 /spl mu/m dielectric film show that losses of 0.6 dB/mm can be obtained at 50 GHz. A new embedded ultra-low loss coplanar line is proposed, with a broad interval of characteristic impedance.

H. Henri | S. Gonzague | V. Matthieu | C. Alain | D. Gilles

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