Microelectromechanical systems in 3D SOI-CMOS: sensing electronics embedded in mechanical structures

We discuss the design of CMOS MEMS in a 3D SOI-CMOS technology. We present layout architectures, preliminary mechanics modeling using finite element analysis and release process flows. An accelerometer structure is used as the model system with electronics embedded into a suspended proof mass. A prototype chip is fabricated in the MIT Lincoln Laboratories that includes test structures and systems for both a capacitive sensed and interferometric sensed accelerometers

[1]  K. Hane,et al.  Standing wave detection and interferometer application using a photodiode thinner than optical wavelength , 1999 .

[2]  G. Fedder,et al.  Laminated high-aspect-ratio microstructures in a conventional CMOS process , 1996, Proceedings of Ninth International Workshop on Micro Electromechanical Systems.

[3]  Andreas G. Andreou,et al.  Surface micromachining in Silicon on Sapphire CMOS technology , 2004, 2004 IEEE International Symposium on Circuits and Systems (IEEE Cat. No.04CH37512).

[4]  Robert Osiander,et al.  An SOS MEMS interferometer , 2004, SPIE MOEMS-MEMS.

[5]  K. J. Gabriel,et al.  Post-CMOS processing for high-aspect-ratio integrated silicon microstructures , 2002 .

[6]  Gary K. Fedder,et al.  Integrated microelectromechanical systems in conventional CMOS , 1997, Proceedings of 1997 IEEE International Symposium on Circuits and Systems. Circuits and Systems in the Information Age ISCAS '97.

[7]  Massood Tabib-Azar,et al.  Sensing means and sensor shells : a new method of comparative study of piezoelectric, piezoresistive, electrostatic, magnetic, and optical sensors , 1995 .

[8]  James B. Kuo,et al.  CMOS VLSI engineering: silicon-on-insulator (SOI) , 1998 .

[9]  Andreas G. Andreou,et al.  Silicon on sapphire CMOS architectures for interferometric array readout , 2004, 2004 IEEE International Symposium on Circuits and Systems (IEEE Cat. No.04CH37512).

[10]  J. Colinge.  Silicon-on-Insulator Technology: Materials to VLSI , 1991 .