论文信息 - A Control Method of Ultrasonic Actuator-Driven Precision Stages Based on Stick-Slip Compensation and Continuous-Path Tracking - 字舞流文

A Control Method of Ultrasonic Actuator-Driven Precision Stages Based on Stick-Slip Compensation and Continuous-Path Tracking

Kiyoshi Ohishi | Tadahiro Ohmi | Takeo Ishikawa | Seiji Hashimoto | Hiroshi Kubota | Koji Kosaka

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