论文信息 - Growth and characterization of amorphous boron nitride dielectric films on Si via RF sputtering at room temperature - 字舞流文

Growth and characterization of amorphous boron nitride dielectric films on Si via RF sputtering at room temperature

Jianxun Liu | Jianjun Shi | G. Du | Yuanpeng Chen | Q. Abbas | Aqrab ul Ahmad | X. Xia | H. Liang