论文信息 - Inline monitoring of SiGe strain relaxed buffers (SRBs) using high-resolution X-ray diffraction: AM: Advanced metrology - 字舞流文

Inline monitoring of SiGe strain relaxed buffers (SRBs) using high-resolution X-ray diffraction: AM: Advanced metrology

N. Loubet | A. Reznicek | J. Gaudiello | M. Wormington | K. Matney | P. Ryan | J. Fronheiser | J. Wall | P. Gin | B. L'herron | B. Mendoza