论文信息 - SEM and SIMS study of the buried SixNy layer formed in silicon - 字舞流文

SEM and SIMS study of the buried SixNy layer formed in silicon

P. Węgierek | A. Fedotov | A. Mazanik | T. Kołtunowicz | A. Saad | E. Rau | A. Frantskevich | N. Frantskevich | P. Żukowski