An Active Metamaterial Antenna With MEMS-Modulated Scanning Radiation Beams

In this letter, for the first time, we report a microelectromechanical system (MEMS)-modulated scanning beam metamaterial antenna based on surface micromachining process. The antenna is implemented by cascading periodical metamaterial modules with a unit length of less than λg/5 to make an electromagnetically homogeneous waveguide, of which the MEMS cantilevers are monolithically integrated in each unit as a radio frequency (RF) switch to modulate the phase constant β, and thereby to realize the scanning beams in the fixed frequency around 8 GHz. Experiments that verified the MEMS-modulated scanning radiation beams are tuned from the backward (around -15°) to the broadside (around 0°) and to the forward (around +15°) directions as the RF-MEMS switches are, respectively, actuated from the states of 0000-0000 (switches in all of the eight units are OFF) to 1010-1010 (switches in the unit of numbers 1, 3, 5, and 7 are ON) and to 1111-1111 (all switches are ON).

[1]  M. Herben,et al.  Switched‐beam array of dielectric rod antenna with RF‐MEMS switch for millimeter‐wave applications , 2015 .

[2]  A. Hirose,et al.  Programmable leaky-wave antenna with periodic J-shaped metamaterial patches , 2015 .

[3]  Gabriel M. Rebeiz.  RF MEMS: Theory, Design and Technology , 2003 .

[4]  H. Fujita,et al.  An active metamaterials antenna controleld by RF-MEMS switches , 2015, 2015 Transducers - 2015 18th International Conference on Solid-State Sensors, Actuators and Microsystems (TRANSDUCERS).

[5]  Robert Plana,et al.  Reconfigurable CRLH cells with new open-end stub and RF MEMS switches on silicon technology , 2010, The 40th European Microwave Conference.

[6]  D. Pozar.  Microwave Engineering , 1990 .

[7]  A. Ishimaru,et al.  A 20 GHz Steerable Array Antenna Using 3-bit Dielectric Slab Phase Shifters on a Coplanar Waveguide , 2007, IEEE Transactions on Antennas and Propagation.

[8]  Willie J Padilla,et al.  Composite medium with simultaneously negative permeability and permittivity , 2000, Physical review letters.

[9]  Michael Hietschold,et al.  Parasitic charging of dielectric surfaces in capacitive microelectromechanical systems (MEMS) , 1998 .

[10]  W. M. Van Spengen,et al.  Capacitive RF MEMS switch dielectric charging and reliability: a critical review with recommendations , 2012 .

[11]  Tatsuo Itoh,et al.  Electromagnetic metamaterials : transmission line theory and microwave applications : the engineering approach , 2005 .

[12]  J. Pendry,et al.  Negative refraction makes a perfect lens , 2000, Physical review letters.

[13]  Hiroyuki Fujita,et al.  MEMS reconfigurable metamaterial for terahertz switchable filter and modulator. , 2014, Optics express.

[14]  Tatsuo Itoh,et al.  Dominant mode leaky-wave antenna with backfire-to-endfire scanning capability , 2002 .

[15]  A. Crunteanu,et al.  Charging in Dielectricless Capacitive RF-MEMS Switches , 2009, IEEE Transactions on Microwave Theory and Techniques.

[16]  D. Jackson,et al.  Leaky‐Wave Antennas , 2008 .