Highly selective ZnO gas sensor based on MOSFET having a horizontal floating-gate

Abstract A metal-oxide-semiconductor field-effect transistor (MOSFET)-based gas sensor having a floating gate (FG) is fabricated and its sensing property is characterized. The gas sensor has 10 nm thick ZnO as a sensing layer prepared by atomic layer deposition (ALD). The FG, the sensing layer and the control gate (CG) are formed horizontally so that diverse sensing materials can be applied to the structure of the sensor without contamination. The gas-sensing performance of the sensor is investigated for seven target gases. Drain currents in NO 2 and H 2 S ambiences are changed by 176% and 58%, respectively, for given NO 2 (20 ppm) and H 2 S (20 ppm) concentrations. Whereas the changes of drain current for NH 3 , SO 2 , CO 2 , CH 4 and C 3 H 8 gases are less than 5%. Response and recovery times for NO 2 are 90 s and 580 s, respectively, at 180 °C. The responses with working temperature and gas concentration are also studied. The sensing mechanisms for NO 2 and H 2 S gases are explained.

[1]  Luca Francioso,et al.  SOLID STATE GAS SENSORS: STATE OF THE ART AND FUTURE ACTIVITIES , 2003 .

[2]  Cell K. Y. Wong,et al.  Nanowire-based gas sensors , 2013 .

[3]  Dinesh K. Aswal,et al.  Preparation of nanofibrous polyaniline films and their application as ammonia gas sensor , 2007 .

[4]  Norio Miura,et al.  Tungsten Oxide-Based Semiconductor Sensor Highly Sensitive to NO and NO2 , 1991 .

[5]  H. Tai,et al.  Fiber-optic evanescent-wave methane-gas sensor using optical absorption for the 3.392-microm line of a He-Ne laser. , 1987, Optics letters.

[6]  Jong-Ho Lee,et al.  1/f Noise Characteristics of Sub-100 nm MOS Transistors , 2006 .

[7]  J. Kotz,et al.  Chemistry & Chemical Reactivity , 1995 .

[8]  Michael J. Tierney,et al.  Electrochemical gas sensor with extremely fast response times , 1993 .

[9]  R. Tatam,et al.  Optical gas sensing: a review , 2012 .

[10]  I. Eisele,et al.  Hybrid-gate suspended field-effect transistors for gas-sensing , 2002, 60th DRC. Conference Digest Device Research Conference.

[11]  Fanli Meng,et al.  Catalyst-free growth of one-dimensional ZnO nanostructures on SiO2 substrate and in situ investigation of their H2 sensing properties , 2015 .

[12]  Helmut Geistlinger,et al.  Electron theory of thin-film gas sensors , 1993 .

[13]  C. Svensson,et al.  A hydrogen-sensitive Pd-gate MOS transistor , 1975 .

[14]  Fanli Meng,et al.  Sub-ppb detection of acetone using Au-modified flower-like hierarchical ZnO structures , 2015 .

[15]  Y. Janssen-Heininger,et al.  Reactive Nitrogen Species-Induced Cell Death Requires Fas-Dependent Activation of c-Jun N-Terminal Kinase , 2004, Molecular and Cellular Biology.

[16]  Giorgio Sberveglieri,et al.  Stable and highly sensitive gas sensors based on semiconducting oxide nanobelts , 2002 .

[17]  A. P. Rambu,et al.  Influence of the substrate nature on the properties of ZnO thin films , 2012 .

[18]  Yasushi Goto,et al.  A study of fast response characteristics for hydrogen sensing with platinum FET sensor , 2006 .

[19]  Ichiro Yamada,et al.  Competitive surface effects of oxygen and water on UV photoresponse of ZnO nanowires , 2009 .

[20]  V. B. Patil,et al.  Fabrication of nanostructured ZnO thin film sensor for NO2 monitoring , 2012 .

[21]  Jongmin Shin,et al.  A New Gas Sensor Based on MOSFET Having a Horizontal Floating-Gate , 2014, IEEE Electron Device Letters.

[22]  Wei Shen,et al.  New Strategy for Rapid Detection of the Simulants of Persistent Organic Pollutants Using Gas Sensor Based on 3-D Porous Single-Crystalline ZnO Nanosheets , 2015, IEEE Sensors Journal.

[23]  Young-Jei Oh,et al.  Gas sensing properties of ZnO thin films prepared by microcontact printing , 2006 .

[24]  S. Maeng,et al.  Single-Walled Carbon Nanotube Network Gas Sensor , 2011 .

[25]  Juin J. Liou,et al.  A review of recent MOSFET threshold voltage extraction methods , 2002, Microelectron. Reliab..

[26]  Junsheng Yu,et al.  Poly(3-hexylthiophene)/polystyrene (P3HT/PS) blends based organic field-effect transistor ammonia gas sensor , 2016 .

[27]  Monika Tomar,et al.  SnO2 thin film sensor with enhanced response for NO2 gas at lower temperatures , 2011 .

[28]  P. Samarasekara,et al.  CO2 gas sensitivity of sputtered zinc oxide thin films , 2007 .

[29]  Shudi Peng,et al.  Hydrothermal Synthesis of Various Hierarchical ZnO Nanostructures and Their Methane Sensing Properties , 2013, Sensors.

[30]  Jinhuai Liu,et al.  Preferential growth of long ZnO nanowires and its application in gas sensor , 2013 .