Development of a large-aperture deformable mirror for wavefront control

A large aperture deformable mirror for correcting the wavefront distortion and controlling the intensity profile of laser beam is presented. The mirror diameter and thickness are 400 mm and 8 mm, respectively. 37 actuators are glued hexagonally on the back surface of the mirror. The mechanical actuator has been designed and fabricated for producing strong force of 300 N in both pushing and pulling process. The initial reflective wavefront of the deformable mirror is (lambda) /6 ((lambda) is 633 nm) in rms value. The application to x-ray laser experiment of the deformable mirror is successful for a uniform line focus pattern by the wavefront control.