Feedback Control of MEMS Gyroscope to Achieve the Tactical-Grade Specifications
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Dong-il Dan Cho | Kunsoo Huh | Sangjun Park | Hyoungho Ko | Yonghwa Park | Taeyong Song | Donghun Kwak | Jahang-hyon Park
[1] Cimoo Song. Commercial vision of silicon based inertial sensors , 1997, Proceedings of International Solid State Sensors and Actuators Conference (Transducers '97).
[2] J. Kim,et al. Robust SOI process without footing for ultra high-performance microgyroscopes , 2003, TRANSDUCERS '03. 12th International Conference on Solid-State Sensors, Actuators and Microsystems. Digest of Technical Papers (Cat. No.03TH8664).
[3] D. Cho,et al. The surface/bulk micromachining (SBM) process: a new method for fabricating released MEMS in single crystal silicon , 1999 .
[4] A. Gripton. The application and future development of a MEMS SiVS/spl reg/ for commercial and military inertial products , 2002, 2002 IEEE Position Location and Navigation Symposium (IEEE Cat. No.02CH37284).
[5] Dong-Il Cho,et al. Surface/bulk micromachined single-crystalline-silicon micro-gyroscope , 2000, Journal of Microelectromechanical Systems.