Atmospheric-pressure hybrid plasma with combination of ac and microwave

A hybrid plasma system with combination of ac and microwave at atmospheric pressure was developed. The hybrid plasma is initiated by ac capillary plasma, is stabilized by a flowing channel of working gas through common electrodes, and is expanded by the dissipation of microwave energy, revealing two distinguishable plasma columns of about 1m in length and a transition point. The capillary in the hybrid plasma system is working as a common electrode for the microwave and ac plasmas. Optical emission spectroscopy is used to characterize and monitor the argon and nitrogen excited species produced in different plasma columns.

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