A High Bandwidth Sigma-Delta Modulator Applied in Micro-Gyroscope

In this paper a fourth-order single-loop sigma-delta modulator applied in micro-gyroscope is designed. The modulator system chose the fully feedforword structure. The signal bandwidth is 200KHz, oversampling ratio is 64 and sampling frequency is 25.6MHz. By system simulation result in Matlab, the signal to noise ratio (SNR) is 92.3dB and effective number of bits (ENOB) is 15.03bits. The whole circuit of modulator is designed and simulated in Cadence Spectre. It is gotten that the SNR is 78.6dB and changes linearly with input level. When input level is bigger than -4dBFs, the modulator becomes overload.

[1]  Sherif Sedky,et al.  Novel architecture for inertial grade SOI MEMS inertial sensors , 2009, 2009 IEEE International SOI Conference.

[2]  R. Schreier,et al.  Delta-sigma data converters : theory, design, and simulation , 1997 .

[3]  Michiel Steyaert,et al.  Erratum to "A 1-V 140-μW 88-dB Audio Sigma-Delta Modulator in 90-nm CMOS" , 2009, IEEE J. Solid State Circuits.

[4]  W. Sansen,et al.  A 1-V 140-/spl mu/W 88-dB audio sigma-delta modulator in 90-nm CMOS , 2004, IEEE Journal of Solid-State Circuits.

[5]  C. Furlong,et al.  Development of packaging for MEMS inertial sensors , 2004, PLANS 2004. Position Location and Navigation Symposium (IEEE Cat. No.04CH37556).

[6]  G. Li,et al.  Packaging MEMS inertial sensors at Motorola , 2003, The 16th Annual Meeting of the IEEE Lasers and Electro-Optics Society, 2003. LEOS 2003..

[7]  G. Temes.  Delta-sigma data converters , 1994 .