Improvement of the chaotic response in MEMS with fuzzy control implemented by ANN

Even when the conditions to achieve robust chaotic response in nonlinear MEMS oscillators are verified, the attainment of the proper parameters for chaotic signal generation is not immediate. This paper presents for the first time a control method based on fuzzy logic and artificial neural networks to maximize the chaotic response, and tests its effectiveness through numerical simulations of a cc-beam MEMS resonator model designed in a commercial CMOS technology.

[1]  J. Moehlis,et al.  Chaos for a Microelectromechanical Oscillator Governed by the Nonlinear Mathieu Equation , 2007, Journal of Microelectromechanical Systems.

[2]  Amir Poursamad,et al.  Robust adaptive fuzzy control of unknown chaotic systems , 2009, Appl. Soft Comput..

[3]  Liang Chen,et al.  Fuzzy Modeling and Adaptive Control of Uncertain Chaotic Systems , 1999, Inf. Sci..

[4]  G. Abadal,et al.  Monolithic CMOS MEMS Oscillator Circuit for Sensing in the Attogram Range , 2008, IEEE Electron Device Letters.

[5]  Wolfgang Hahn,et al.  Stability of Motion , 1967 .

[6]  H. Seppa,et al.  Nonlinear limits for single-crystal silicon microresonators , 2004, Journal of Microelectromechanical Systems.

[7]  Bernard P. Zajac.  Applied cryptography: Protocols, algorithms, and source code in C , 1994 .

[8]  J. Verd,et al.  Fuzzy Control for Chaotic Response Improvement in MEMS Resonators , 2015 .

[9]  Stefano Lenci,et al.  Forced Harmonic Vibration in a Duffing Oscillator with Negative Linear Stiffness and Linear Viscous Damping , 2011 .

[10]  Amir H.D. Markazi,et al.  Chaos prediction and control in MEMS resonators , 2010 .

[11]  Chuen-Tsai Sun,et al.  Neuro-fuzzy modeling and control , 1995, Proc. IEEE.

[12]  Bruce Schneier,et al.  Applied cryptography : protocols, algorithms, and source codein C , 1996 .

[13]  Alan V. Oppenheim,et al.  Synchronization of Lorenz-based chaotic circuits with applications to communications , 1993 .

[14]  N. C. MacDonald,et al.  Chaos in MEMS, parameter estimation and its potential application , 1998 .

[15]  Carroll,et al.  Synchronization in chaotic systems. , 1990, Physical review letters.

[16]  Fang Chen,et al.  Integrated HF CMOS-MEMS square-frame resonators with on-chip electronics and electrothermal narrow gap mechanism , 2005, The 13th International Conference on Solid-State Sensors, Actuators and Microsystems, 2005. Digest of Technical Papers. TRANSDUCERS '05..

[17]  Henk Nijmeijer,et al.  Modelling the dynamics of a MEMS resonator : simulations and experiments , 2008 .