Modeling optical microscope images of integrated circuit structures
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[1] D. Nyyssonen. Theory of optical edge detection and imaging of thick layers , 1982 .
[2] F. Kaspar,et al. Diffraction by thick, periodically stratified gratings with complex dielectric constant , 1973 .
[3] John S. Hartman,et al. Quantitative surface topography determination by Nomarski reflection microscopy. I. Theory , 1979 .
[4] C. P. Kirk,et al. Optical microscope imaging of lines patterned in thick layers with variable edge geometry: theory , 1988 .
[5] C. Burckhardt. Diffraction of a Plane Wave at a Sinusoidally Stratified Dielectric Grating , 1966 .