Synthesis of porous nano-sized AlN by chemical vapor synthesis

We report the synthesis of AlN powders by the chemical vapor synthesis of an AlCl3–NH3–N2–H2 system. The starting material was gasified AlCl3, generated using a preheating system. AlCl3 gas was transported to a tube furnace in NH3–N2–H2 atmosphere. We synthesized highly crystalline AlN at over 900  °C. The average size of the spherical AlN particles decreased from 250 to 40 nm with increasing reaction temperature in the tube furnace. Porous nano-sized particles synthesized at high reaction temperatures have low oxygen contents and high thermal stability.