Internet‐based remote assembly of micro‐electro‐mechanical systems (MEMS)

This paper presents our development of a novel Internet‐based E‐manufacturing system to advance applications in micromanipulation and microassembly using an in situ polyvinylidene fluoride (PVDF) piezoelectric sensor. In this system, to allow close monitoring of magnitude and direction of microforces (adhesion, surface tension, friction, and assembly forces) acting on microdevices during assembly, the PVDF polymer films are used to fabricate the highly sensitive 1D and 2D sensors, which can detect the real‐time microforce and force rate information during assembly processes. This technology has been successfully used to perform a tele‐assembly of the surface MEMS structures with force/visual feedback via Internet between USA and Hong Kong. Ultimately, this E‐manufacture system will provide a critical and major step towards the development of automated micromanufacturing processes for batch assembly of microdevices.

[1]  Kenneth A. Goldberg,et al.  Microassembly technologies for MEMS , 1998, Photonics West - Micro and Nano Fabricated Electromechanical and Optical Components.

[2]  T. Kenny.  Nanometer-scale force sensing with MEMS devices , 2001, IEEE Sensors Journal.

[3]  Ronald S. Fearing,et al.  Alignment of microparts using force-controlled pushing , 1998, Other Conferences.

[4]  V. K. Varadan,et al.  Characterization of all the elastic, dielectric, and piezoelectric constants of uniaxially oriented poled PVDF films , 2002, IEEE Transactions on Ultrasonics, Ferroelectrics and Frequency Control.

[5]  P. Muralt,et al.  Ferroelectric sensors , 2001, IEEE Sensors Journal.

[6]  Z. Nagy,et al.  Intracytoplasmic sperm injection in the mouse. , 1995, Human reproduction.

[7]  Ronald S. Fearing,et al.  Survey of sticking effects for micro parts handling , 1995, Proceedings 1995 IEEE/RSJ International Conference on Intelligent Robots and Systems. Human Robot Interaction and Cooperative Robots.

[8]  Silvestro Micera,et al.  Towards a force-controlled microgripper for assembling biomedical microdevices , 2000 .

[9]  Fumihito Arai,et al.  New force measurement and micro grasping method using laser Raman spectrophotometer , 1996, Proceedings of IEEE International Conference on Robotics and Automation.

[10]  W. J. Karl,et al.  Cantilever unified theory and optimization for sensors and actuators , 2000 .

[11]  Toshiro Higuchi,et al.  A micropositioning device for precision automatic assembly using impact force of piezoelectric elements , 1995, Proceedings of 1995 IEEE International Conference on Robotics and Automation.

[12]  S. Tsuda,et al.  Pretreatment of rats with an organophosphorus insecticide, chlorfenvinphos, protects against subsequent challenge with the same compound. , 1990, Fundamental and applied toxicology : official journal of the Society of Toxicology.

[13]  T. Itoh,et al.  Micromachined piezoelectric force sensors based on PZT thin films , 1996, IEEE Transactions on Ultrasonics, Ferroelectrics and Frequency Control.

[14]  Yu Zhou,et al.  Sensor-based microassembly of hybrid MEMS devices , 1998 .

[15]  M. Weinberg.  Working equations for piezoelectric actuators and sensors , 1999 .

[16]  Imad H. Elhajj,et al.  A 2-D PVDF force sensing system for micro-manipulation and micro-assembly , 2002, Proceedings 2002 IEEE International Conference on Robotics and Automation (Cat. No.02CH37292).

[17]  Generator Ground Protection.  An American National Standard , 1985 .

[18]  Sergej Fatikow,et al.  A Flexible Microrobot-Based Microassembly Station , 2000, J. Intell. Robotic Syst..

[19]  P. Benech,et al.  Acceleration measurement using PVDF , 1996, IEEE Transactions on Ultrasonics, Ferroelectrics and Frequency Control.

[20]  S. Koelemijer Chollet,et al.  Cost effective micro-system assembly automation , 1999, 1999 7th IEEE International Conference on Emerging Technologies and Factory Automation. Proceedings ETFA '99 (Cat. No.99TH8467).

[21]  T. Ikeda.  Fundamentals of piezoelectricity , 1990 .