Dynamical Research on a Micro-Displacement Actuator Based on V-Type Guide-Way

A new type of the micro-displacement device based on V-shaped groove by using piezoelectric stack as the driver was presented. The performance characteristic of the driving device was introduced and its working mechanism was discussed. the dynamic formulation of inertial actuator is established, by using matlab software, the kinetic simulation of the actuator is carried out, the structure of newly inertial actuator is designed and manufactured. The simulation and experiment of the actuator is conducted. The simulation results agree well with the experimental results indicates that the simple associated symmetry electrical signal can provide stable stepping movement, the speed of 0.5mm/s, high resolution of 1μm, maximum loading capacity of 600g.