Micro gears and turbines etched from silicon
暂无分享,去创建一个
[1] E. Bassous. Fabrication of novel three-dimensional microstructures by the anisotropic etching of , 1978, IEEE Transactions on Electron Devices.
[2] K. Bean,et al. Anisotropic etching of silicon , 1978, IEEE Transactions on Electron Devices.
[3] K.E. Petersen,et al. Silicon as a mechanical material , 1982, Proceedings of the IEEE.
[4] James B. Angell,et al. A microminiature fluidic amplifier , 1988 .