A method for evaluating the components of the force acting on a moving part of a pneumatic linear bearing is proposed. The total force acting on the moving part is accurately measured as the inertial force using an optical interferometer. Then, the components of the force, such as the force component depending on position, the force component depending on velocity, and the force component depending on tilt angle, are evaluated using the least-squares method. In the experiment, the total force acting on the moving part is measured with the standard uncertainty of approximately 0.001 N, which corresponds to approximately 0.003% (30 ppm) of the gravitational force acting on it (M=4.119 kg) of approximately 40 N (40 N). The experimentally evaluated values of these force components well coincide with the theoretically expected values.
[1]
Applied measurements of multipurpose precise interferometer (AMOS-1)
,
1993
.
[2]
Y. Fujii,et al.
Measurements of frictional characteristics of a pneumatic linear bearing
,
1999
.
[3]
Yusaku Fujii.
Measurement of steep impulse response of a force transducer
,
2003
.
[4]
Yusaku Fujii,et al.
Possible application of mass levitation to force measurement
,
2001
.
[5]
Yusaku Fujii,et al.
Balance for Measuring Mass Under Microgravity Conditions
,
2001
.
[6]
Tadashi Egami,et al.
Optimal Preview Repetitive Control for Air Slide Linear Motor
,
1994
.
[7]
M. Negishi,et al.
A high-precision coordinate measuring system for super-smooth polishing
,
1995
.