论文信息 - A FLAT HIGH-FREQUENCY SCANNING MICROMIRROR

A FLAT HIGH-FREQUENCY SCANNING MICROMIRROR

We present the Staggered Torsional Electrostatic Combdrive (STEC) fabrication process that creates thick mirrors with hightorque actuators, thereby allowing high-speed optical scanning with large angular deflections. We have demonstrated a 550 μmdiameter mirror capable of scanning an optical angle of 24.9° at its 34 kHz resonant frequency with less than 30 nm static and dynamic deformation. The optical resolution is 350 pixels – very near the diffraction-limited resolution of 355 pixels with 655 nm wavelength light.

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