Ion projection lithography (IPL): posters presented at the 5th Intrnational SEMATECH Next-Generation Lithography (NGL) workshop

At the 5th NGL Workshop, 28-3OAug200l , the IPL team, headed by Infineon Technologies, has presented overhead foils1 providing an overview of results as achieved with the Ion Projection Lithography Process Development Tool (PDT) which has been developed and realized by IMS-Vienna as part of the 1997-2001 European MEDEA project. Furthermore concepts for a full field (25X25mm2) ion projection stepper and it's wafer throughput potential have been presented.