论文信息 - Selective p-type Doping of GaN:Si by Mg Ion Implantation and Multicycle Rapid Thermal Annealing - 字舞流文

Selective p-type Doping of GaN:Si by Mg Ion Implantation and Multicycle Rapid Thermal Annealing

Jordan D. Greenlee | J. Freitas | K. Hobart | C. Eddy | T. Anderson | J. Greenlee | L. Ruppalt | F. Kub | M. Tadjer | J. Hite | B. Feigelson