Surface-micromachined polysilicon MOEMS for adaptive optics

Abstract This paper presents an overview of Air Force research and development programs in micro-opto-electro-mechanical systems (MOEMS) for adaptive optics using commercially available surface-micromachined polysilicon fabrication processes. Adaptive optic systems are a growing area of interest because advanced technologies are now becoming available to make these systems lightweight, low power, and compact. In short, they are becoming practical for space, missile, and man-portable applications. The technologies that are making this possible include highly integrated low power electronics, new processing architectures for error sensing and control, flexible high density packaging, and especially MOEMS. Micromirror design, mirror array design, and design tradeoffs are discussed, as well as high density packaging for combining MEMS-specific die with standard electronic die. The micromirror devices described below were developed for adaptive optic systems, and for exploring the design, manufacture, and actuation options made possible by the commercial surface-micromachining fabrication processes.