OpenCV-based technology for stain detection of quartz wafers

Stain detection is an important part of defect detection of the quartz wafers.In order to achieve ideal stain detection,the image processing technology based on OpenCV(Open Source Computer Vision Library) is used to detect the stain defect of quartz wafers.In this paper,the image processing(including smooth denoising,binary threshold segmentation,contour extraction and tracking) is used to calculate perimeter of defect contour profile,and compare wafer contours with defects and without defect to provide the criterion for the stain detection of quartz wafers.The experimental results show that the application of OpenCV functions can shorten the time of preprocessing,in visual studio 2008 programming environment,and improve the work efficiency.