An Integrated Gravimetric FBAR Circuit for Operation in Liquids Using a Flip-Chip Extended 0.13μm CMOS Technology

A 0.13μm CMOS chip is fabricated with eight resonator-amplifiers to demonstrate a highly integrated gravimetric sensor based on an FBAR oscillator. The oscillator is attached via flip-chip bonding to a CMOS resonator. Each active 1.86GHz oscillator draws 27mA from a single 17V supply for 200×200μm2 sensors. The resonance frequency shifts by 5MHz in ethanol and 7.3MHz in water and jitter is <3kHz

[1]  J. Carlsson,et al.  Quartz-crystal mass sensors with glued foil electrodes , 1996 .

[2]  G. Sauerbrey,et al.  Use of quartz vibration for weighing thin films on a microbalance , 1959 .

[3]  Christoph Hagleitner,et al.  Very high Q-factor in water achieved by monolithic, resonant cantilever sensor with fully integrated feedback , 2003, Proceedings of IEEE Sensors 2003 (IEEE Cat. No.03CH37498).

[4]  W. Simburger,et al.  Biochemical sensors based on bulk acoustic wave resonators , 2003, IEEE International Electron Devices Meeting 2003.

[5]  J. Rabaey,et al.  A 400 /spl mu/W-RX, 1.6mW-TX super-regenerative transceiver for wireless sensor networks , 2005, ISSCC. 2005 IEEE International Digest of Technical Papers. Solid-State Circuits Conference, 2005..

[6]  R. Aigner,et al.  Advancement of MEMS into RF-filter applications , 2002, Digest. International Electron Devices Meeting,.

[7]  Wolfram Wersing,et al.  Novel integrated FBAR sensors: a universal technology platform for bio- and gas-detection , 2003, Proceedings of IEEE Sensors 2003 (IEEE Cat. No.03CH37498).

[8]  G. Sauerbrey.  Verwendung von Schwingquarzen zur Wägung dünner Schichten und zur Mikrowägung , 1959 .