Compact 13.5-nm free-electron laser for extreme ultraviolet lithography
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Oleg A. Shevchenko | Nikolay A. Vinokurov | A. N. Matveenko | G. N. Kulipanov | Yehoshua Socol | G. Kulipanov | A. Matveenko | O. Shevchenko | Y. Socol | N. Vinokurov
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