论文信息 - Low-Temperature Atomic Layer Deposition of Platinum Using (Methylcyclopentadienyl)trimethylplatinum and Ozone - 字舞流文

Low-Temperature Atomic Layer Deposition of Platinum Using (Methylcyclopentadienyl)trimethylplatinum and Ozone

C. Detavernier | J. Dendooven | Geert Rampelberg | G. Marin | H. Poelman | M. Filez | E. Fonda | K. Devloo-Casier | Ranjith K. Ramachandran | Kilian Devloo-Casier | Guy B. Marin | Guy B. Marin