CO addition in low-pressure chemical vapour deposition of medium-temperature TiCxN1-x based hard coatings
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C. Mitterer | C. Czettl | H. Hutter | D. Rafaja | U. Mühle | S. Puchner | M. Penoy | C. Michotte | M. Kathrein
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C. Mitterer | C. Czettl | H. Hutter | D. Rafaja | U. Mühle | S. Puchner | M. Penoy | C. Michotte | M. Kathrein