Chlorine Gas Sensing Using ZnO/SiC Hetero-Contact

Chlorine gas sensing characteristics of ZnO/SiC hetero-contact was measured at 20°C in the Cl2 concentration range from 400 to 1600ppm. The current-voltage curve of the contact showed a rectifying character in which the forward-direction bias is positive on SiC. The current at the forward bias decreased with increasing Cl2 concentration up to 1600ppm. No sensitivity against H2 and HCl gases was observed. From the capacitance-voltage relations, height of the potential barrier at ZnO surface was found to increase by introduction of Cl2 gas.