On the Way to Zero Defect of Plastic-Encapsulated Electronic Power Devices—Part I: Metallization

Concerning thermomechanically induced failures, such as metal line deformation and passivation cracks, there is a practicable way to achieve the zero-defect limit of plastic-encapsulated power devices. This limit can be reached by evaluating the influence of the major components involved and, consequently, by selecting the appropriate materials and measures. On the other hand, the interdependence between all components must always be kept in mind, i.e., chip and package have to be regarded as an entity. An important finding was that applying simply one improvement step will not necessarily lead to the desired goal. Only the implementation of all improvement steps considering their interdependence is the key for the perfect overall system chip and package. In Part I of this series of papers, the yield stress of the power metallization is shown to play a crucial role for the generation of metal deformation and passivation cracks. Understanding the ratcheting mechanism led to the development of a new layered metallization material with a distinctly increased yield stress, resulting in a considerably reduced failure generation.

[2]  C. Lee,et al.  Investigation of a novel leadframe treatment for "dry-pack free" packaging , 1997, 1997 Proceedings 47th Electronic Components and Technology Conference.

[3]  R. J. Usell,et al.  Experimental and Mathematical Determination of Mechanical Strains within Plastic IC Packages and Their Effect on Devices During Environmental Tests , 1981, 19th International Reliability Physics Symposium.

[4]  P. Hazzledine,et al.  Yield stress of nano- and micro-multilayers , 1996 .

[5]  R. C. Blish,et al.  Thin-Film Cracking and Wire Ball Shear in Plastic Dips Due to Temperature Cycle and Thermal Shock , 1987, 25th International Reliability Physics Symposium.

[6]  Kuo-Ning Chiang,et al.  Reliability of interfacial adhesion in a multi-level copper/low-k interconnect structure , 2007, Microelectron. Reliab..

[7]  M. Stecher,et al.  Evaluation of Package Stress during Temperature Cycling using Metal Deformation Measurement and FEM Simulation , 2006 .

[8]  J. Chaboche Constitutive equations for cyclic plasticity and cyclic viscoplasticity , 1989 .

[9]  Masaaki Isagawa,et al.  Deformation of AL Metallization in Plastic Encapsulated Semiconductor Devices Caused by Thermal Shock , 1980, 18th International Reliability Physics Symposium.

[10]  E. Arzt,et al.  Plasticity and Interfacial Dislocation Mechanisms in Epitaxial and Polycrystalline Al Films Constrained by Substrates , 2002 .

[11]  J. W. McPherson,et al.  Temperature-cycling acceleration factors for aluminium metallization failure in VLSI applications , 1990, 28th Annual Proceedings on Reliability Physics Symposium.

[12]  R. C. Blish,et al.  Failure rate model for thin film cracking in plastic ICs , 1991, 29th Annual Proceedings Reliability Physics 1991.

[13]  R. Tilgner,et al.  On the role of adhesion in plastic packaged chips under thermal cycling stress , 1992, 1992 Proceedings 42nd Electronic Components & Technology Conference.

[14]  Metal film crawling in interconnect structures caused by cyclic temperatures , 2001 .

[15]  K. Müller,et al.  Thermomechanical assessment of molding compounds , 1992 .

[16]  Z. Suo,et al.  Plastic ratcheting induced cracks in thin film structures , 2002 .

[17]  Tasnim Hassan,et al.  Anatomy of coupled constitutive models for ratcheting simulation , 2000 .

[18]  R. Zelenka A reliability model for interlayer dielectric cracking during temperature cycling , 1991, 29th Annual Proceedings Reliability Physics 1991.

[19]  P. Flinn,et al.  Mechanical stress as a function of temperature in aluminum films , 1988 .

[20]  Kazunori Hiraoka,et al.  Elastoplastic creep analysis of thermal stress and strain in aluminum interconnects of LSIs , 1994 .

[21]  P. Alpern,et al.  Correction to "A Simple Test Chip to Assess Chip and Package Design in the Case of Plastic Assemblin , 1995 .

[22]  H. Inayoshi,et al.  Moisture-Induced Aluminum Corrosion and Stress on the Chip in Plastic-Encapsulated LSIs , 1979, 17th International Reliability Physics Symposium.

[23]  R. Tilgner,et al.  A simple test chip to assess chip and package design in the case of plastic assembling , 1994 .