论文信息 - Low-loss SOI photonic wires and ring resonators fabricated with deep UV lithography

Low-loss SOI photonic wires and ring resonators fabricated with deep UV lithography

We demonstrate single-mode photonic wires in silicon-on-insulator with propagation loss as low as 2.4 dB/cm, fabricated with deep ultraviolet lithography and dry etching. We have also made compact racetrack and ring resonators functioning as add-drop filters, attaining Q values larger than 3000 and low add-drop crosstalk.

[1] R. Baets,et al. Fabrication of photonic crystals in silicon-on-insulator using 248-nm deep UV lithography , 2002 .

[2] H. Fukuda. Analysis of line edge roughness using probability process model for chemically amplified resists , 2002, 2002 International Microprocesses and Nanotechnology Conference, 2002. Digest of Papers..

[3] W. Henschel,et al. Asymmetrically coupled silicon-on-insulator microring resonators for compact add-drop multiplexers , 2003, IEEE Photonics Technology Letters.

[4] Wim Bogaerts,et al. Scattering at sidewall roughness in photonic crystal slabs. , 2003, Optics letters.

[5] Mike V. Williamson,et al. Enhanced quantitative analysis of resist image contrast upon line- edge roughness (LER) , 2003, SPIE Advanced Lithography.

[6] Vincent Wiaux,et al. Large-scale production techniques for photonic nanostructures , 2003, SPIE Optics + Photonics.

[7] L C Kimerling,et al. Fabrication of ultralow-loss Si/SiO(2) waveguides by roughness reduction. , 2001, Optics letters.

[8] Roel Baets,et al. Optical modelling of photonic crystals and VCSELs using eigenmode expansion and perfectly matched layers , 2001 .