Fabrication of Silicon Nanostructures for Application in Photonics
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M. Baranov | Y. Zharova | V. Tolmachev | T. Vartanyan | P. S. Parfenov | K. Bogdanov | N. Toropov | A. N. Kamalieva | A. Kamalieva | Mikhail A Baranov | P. S. Parfenov | V. A. Tolmachev