An automatic acceleration compensation system for a single-mass MEMS gyroscope

This paper presents the architecture and experimental verification of an automatic acceleration compensation system applied to a single-mass MEMS gyroscope. The proposed method eliminates low frequency proof mass motion of the gyroscope due to external accelerations, suppressing the g-sensitivity of the gyroscope bias up to 12 times. This is achieved by dedicated acceleration cancellation electrodes (ACEs) for the first time in the literature, eliminating any degradation of the sensor bias stability and noise performance during the compensation process. The method is also verified to improve the scale factor nonlinearity from 2700ppm to 1800ppm for ±600°/s range, and for centrifugal accelerations as high as 0.5g.

[1]  Sang Won Yoon,et al.  Vibration-induced errors in MEMS tuning fork gyroscopes , 2012 .

[2]  T. Akin,et al.  Effect of quadrature error on the performance of a fully-decoupled MEMS gyroscope , 2011, 2011 IEEE 24th International Conference on Micro Electro Mechanical Systems.

[3]  G.A. Geen.  Progress in integrated gyroscopes , 2004, IEEE Aerospace and Electronic Systems Magazine.

[4]  T. Akin,et al.  Simultaneous detection of linear and coriolis accelerations on a mode-matched MEMS gyroscope , 2014, 2014 IEEE 27th International Conference on Micro Electro Mechanical Systems (MEMS).

[5]  Harvey Weinberg.  Gyro Mechanical Performance: The Most Important Parameter , 2011 .

[6]  Tayfun Akin,et al.  Wafer level hermetic sealing of MEMS devices with vertical feedthroughs using anodic bonding , 2015 .