Rapid 3D µ-printing of polymer optical whispering-gallery mode resonators.

A novel microfabrication method for rapid printing of polymer optical whispering-gallery mode (WGM) resonators is presented. A 3D micro-printing technology based on high-speed optical spatial modulator (SLM) and high-power UV light source is developed to fabricate suspended-disk WGM resonator array using SU-8 photoresist. The optical spectral responses of the fabricated polymer WGM resonators were measured with a biconically tapered optical fiber. Experimental results reveal that the demonstrated method is very flexible and time-saving for rapid fabrication of complex polymer WGM resonators.

[1]  A. Matsko,et al.  Optical resonators with whispering-gallery modes-part I: basics , 2006, IEEE Journal of Selected Topics in Quantum Electronics.

[2]  Kerry J. Vahala,et al.  Chemically etched ultrahigh-Q wedge-resonator on a silicon chip , 2012, Nature Photonics.

[3]  V. R. Dantham,et al.  Taking whispering gallery-mode single virus detection and sizing to the limit , 2012 .

[4]  H. Schwefel,et al.  Polarization properties and dispersion relations for spiral resonances of a dielectric rod , 2005, physics/0502057.

[5]  Kerry J Vahala,et al.  Replica-molded high-Q polymer microresonators. , 2004, Optics letters.

[6]  D. Keng,et al.  Whispering gallery micro-global positioning system for nanoparticle sizing in real time , 2014 .

[7]  Handong Sun,et al.  Advances and Prospects for Whispering Gallery Mode Microcavities , 2015 .

[8]  Alper Kiraz,et al.  Optical sensor for hydrogen gas based on a palladium-coated polymer microresonator , 2015 .

[9]  Tobias Rossmann,et al.  Spectral shift response of optical whispering-gallery modes due to water vapor adsorption and desorption , 2010 .

[10]  T. J. Kippenberg,et al.  Ultra-high-Q toroid microcavity on a chip , 2003, Nature.

[11]  Anatolii N Oraevsky,et al.  Whispering-gallery waves , 2002 .

[12]  Matthew R Foreman,et al.  Whispering gallery mode sensors. , 2015, Advances in optics and photonics.

[13]  M. Gorodetsky,et al.  Ultimate Q of optical microsphere resonators. , 1996, Optics letters.

[14]  K. Vahala,et al.  Ultralow-threshold microcavity Raman laser on a microelectronic chip. , 2004, Optics letters.

[15]  Florian Sedlmeir,et al.  High-Q MgF₂ whispering gallery mode resonators for refractometric sensing in aqueous environment. , 2014, Optics express.

[16]  Tobias J. Kippenberg,et al.  Cavity Optomechanics with Whispering-Gallery Mode Optical Micro-Resonators , 2010, 1003.5922.

[17]  A. Boisen,et al.  Single-Mode Waveguides With SU-8 Polymer Core and Cladding for MOEMS Applications , 2007, Journal of Lightwave Technology.

[18]  K. Vahala.  Optical microcavities : Photonic technologies , 2003 .

[19]  S. Arnold,et al.  Whispering-gallery-mode biosensing: label-free detection down to single molecules , 2008, Nature Methods.

[20]  Larry R. Dalton,et al.  Polymer micro-ring filters and modulators , 2002 .

[21]  B. Sturman,et al.  Whispering gallery modes at the rim of an axisymmetric optical resonator: analytical versus numerical description and comparison with experiment. , 2013, Optics express.

[22]  Lute Maleki,et al.  Nonlinear optics and crystalline whispering gallery mode cavities. , 2004, Physical review letters.

[23]  L J Wang,et al.  Sub-kHz lasing of a CaF₂ whispering gallery mode resonator stabilized fiber ring laser. , 2014, Optics express.

[24]  Sailing He,et al.  Rapid Fabrication of Complex 3D Extracellular Microenvironments by Dynamic Optical Projection Stereolithography , 2012, Advanced materials.

[25]  M. Oxborrow.  Traceable 2-D Finite-Element Simulation of the Whispering-Gallery Modes of Axisymmetric Electromagnetic Resonators , 2006, IEEE Transactions on Microwave Theory and Techniques.

[26]  Christoph Vannahme,et al.  High-Q conical polymeric microcavities , 2010 .