Kinematics Error Compensation for a Surface Measurement Probe on an Ultra-Precision Turning Machine

In order to enhance the measurement availability for manufacturing applications, on-machine surface measurement (OMSM) is integrated onto the machine tools, which avoids the errors caused by re-positioning workpieces and utilizes the machine axes to extend the measuring range as well. However, due to the fact that measurement probe actuation is performed using the machine tool axes, the inherent kinematics error will inevitably induce additional deviations onto the OMSM results. This paper presents a systematic methodology of kinematics error modelling, measurement, and compensation for OMSM on an ultra-precision turning lathe. According to the measurement task, a selective kinematics error model is established with four primary error components in the sensitive measurement direction, based on multi-body theory and a homogeneous transformation matrix (HTM). In order to separate the artefact error from the measurement results, the selected error components are measured using the reversal method. The measured error value agrees well with the machine tool’s specification and a kinematics error map is generated for further compensation. To verify the effectiveness of the proposed kinematics error modelling, measurement, and compensation, an OMSM experiment of an optically flat mirror is carried out. The result indicates the OMSM is the superposition of the sample surface form error and the machine tool kinematics error. With the implementation of compensation, the accuracy of the characterized flatness error from the OMSM improves by 67%.

[1]  Xiangqian Jiang,et al.  High resolution position measurement from dispersed reference interferometry using template matching. , 2016, Optics express.

[2]  Alan Campbell Measurement of lathe Z-slide straightness and parallelism using a flat land , 1995 .

[3]  R. Ryan Vallance,et al.  Techniques for calibrating spindles with nanometer error motion , 2005 .

[4]  Wei Gao,et al.  Measurement and compensation of error motions of a diamond turning machine , 2007 .

[5]  Y. Qin,et al.  Micro-manufacturing: research, technology outcomes and development issues , 2010 .

[6]  Robert J. Hocken,et al.  Self-Calibration: Reversal, Redundancy, Error Separation, and ‘Absolute Testing’ , 1996 .

[7]  Chi Fai Cheung,et al.  A kinematics and experimental analysis of form error compensation in ultra-precision machining , 2008 .

[8]  Jinwei Fan,et al.  Dynamic and static characteristics of a hydrostatic spindle for machine tools , 2012 .

[9]  Daisuke Kono,et al.  High-precision machining by measurement and compensation of motion error , 2008 .

[10]  Kai Cheng,et al.  Design of ultraprecision machine tools with applications to manufacture of miniature and micro components , 2005 .

[11]  Paul Morantz,et al.  Ultra-precision: enabling our future , 2012, Philosophical Transactions of the Royal Society A: Mathematical, Physical and Engineering Sciences.

[12]  Eric R. Marsh,et al.  Precision Spindle Metrology , 2007 .

[13]  Fengzhou Fang,et al.  Manufacturing and measurement of freeform optics , 2013 .

[14]  Aun-Neow Poo,et al.  Error compensation in machine tools — a review: Part I: geometric, cutting-force induced and fixture-dependent errors , 2000 .

[15]  Frank Wardle,et al.  Design of a five-axis ultra-precision micro-milling machine—UltraMill. Part 2: integrated dynamic modelling, design optimisation and analysis , 2010 .

[16]  Zi-qiang Yin,et al.  High accuracy error separation technique for on-machine measuring straightness , 2006 .

[17]  Geok Soon Hong,et al.  Profile error compensation in fast tool servo diamond turning of micro-structured surfaces , 2012 .

[18]  Wanqun Chen,et al.  Volumetric error modeling and sensitivity analysis for designing a five-axis ultra-precision machine tool , 2013 .

[19]  X. Jiang,et al.  Precision surface measurement , 2012, Philosophical Transactions of the Royal Society A: Mathematical, Physical and Engineering Sciences.

[20]  Chana Raksiri,et al.  Geometric and force errors compensation in a 3-axis CNC milling machine , 2004 .

[21]  Shugui Liu,et al.  Identification and compensation of main machining errors on surface form accuracy in ultra-precision diamond turning , 2016 .

[22]  Jung Chul Lee,et al.  Precision measurement of carriage slide motion error of a drum roll lathe , 2012 .

[23]  Robert Schmitt,et al.  Geometric error measurement and compensation of machines : an update , 2008 .