가장자리 자석을 적용한 회전자석형 마그네트론 소스 개발

In this paper, we studied a high performance rotary magnet type magnetron source with rotational edge magnets which are equipped in the edge of the cylindrical target for roll-to-roll sputter system. We analyzed the density of magnetic field as a function of size variation of the moving magnet which are in the edge of the target. On the basis of the results of magnet array, Roll-to Roll magnetron source for 1,100 mm width was fabricated and tested. The uniformity of the film thickness was ±2.16% and ±4.13%, and the resistivity was 1.76×10 -3 Ω·㎝.